Multi-scale Analysis for CVD Processes(3rd Report, Construction of Total Cross Section and Scattering Angle Model)

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ژورنال

عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B

سال: 2003

ISSN: 0387-5016,1884-8346

DOI: 10.1299/kikaib.69.1028